In this paper, a novel optical MEMS accelerometer is proposed based on evanescent coupling between parallel silicon nanowaveguides. The coupling length between nanowaveguides changes due to the input ...

Anti-spring mechanisms are widely used for improving the noise performance of MEMS accelerometers due to their stiffness softening effect. However, the existing mechanisms typically require large bias ...

New platform combines genetic algorithms with freeform geometry to design resilient, high-performance MEMS accelerometers tolerant to fabrication flaws. (Nanowerk News) Traditionally, ...

In a major leap forward for microelectromechanical systems (MEMS) technology, researchers have unveiled a novel miniaturized accelerometer that can boost sensitivity, reducing noise and bias ...

The demand for microelectromechanical systems (MEMS) resilient to harsh environments is growing. Silicon-based MEMS struggle under extreme conditions, limited by their performance at elevated ...

Standard Finite Element (FE) models, especially those that incorporate multiple physical domains, consist of detailed representations of a device that include a large number of Degrees of Freedom (DoF ...

Accelerometers—devices that measure change in velocity—are built into automobiles, airplanes, cell phones, pacemakers, and scores of other products. They warn of potentially destructive vibrations in ...

Quantifying the vibration of industrial machinery and using that information for condition monitoring (CM) has long been an ambitious goal, but also one with significant technical and implementation ...

This file type includes high-resolution graphics and schematics when applicable. Ed Spence, Marketing Manager, Analog Devices Inc. A growing number of condition-monitoring products now use a ...

Semiconductor Engineering sat down to talk about future developments and challenges for microelectromechanical systems (MEMS) with Gerold Schropfer, director of MEMS products and European operations ...

MEMS is an acronym that stands for microelectromechanical systems – exceptionally small devices that incorporate mechanical, electrical, and frequently optical components on a single microchip. These ...